This study shows that a thin Ni film on Al/Ti/4H-SiC metal pads allows to preserve the pad form factor during a 1000 °C/2 min treatment, provided that the Al and Ti film thicknesses are sufficiently thin. Moreover, by reducing the Al to Ti thickness ratio, droplet formation in the contact area is avoided and a mirror-like appearance is obtained. This optimal contact morphology corresponds to a specific contact resistance of few 10-4Ωcm2at room temperature on p-type 4HSiC with resistivity in the range 0.1–1 Ωcm.

Ni-Al-Ti ohmic contacts with preserved form factor and few 10- 4Ωcm2 specific resistance on 0.1-1 Ωcm p-type 4H-SiC / Nipoti, Roberta; Puzzanghera, Maurizio; Canino, Maria Concetta; Sozzi, Giovanna; Fedeli, Paolo. - 924:(2018), pp. 385-388. ((Intervento presentato al convegno International Conference on Silicon Carbide and Related Materials, ICSCRM 2017 tenutosi a usa nel 2017 [10.4028/www.scientific.net/MSF.924.385].

Ni-Al-Ti ohmic contacts with preserved form factor and few 10- 4Ωcm2 specific resistance on 0.1-1 Ωcm p-type 4H-SiC

Nipoti, Roberta
;
Puzzanghera, Maurizio;Sozzi, Giovanna;Fedeli, Paolo
2018

Abstract

This study shows that a thin Ni film on Al/Ti/4H-SiC metal pads allows to preserve the pad form factor during a 1000 °C/2 min treatment, provided that the Al and Ti film thicknesses are sufficiently thin. Moreover, by reducing the Al to Ti thickness ratio, droplet formation in the contact area is avoided and a mirror-like appearance is obtained. This optimal contact morphology corresponds to a specific contact resistance of few 10-4Ωcm2at room temperature on p-type 4HSiC with resistivity in the range 0.1–1 Ωcm.
9783035711455
Ni-Al-Ti ohmic contacts with preserved form factor and few 10- 4Ωcm2 specific resistance on 0.1-1 Ωcm p-type 4H-SiC / Nipoti, Roberta; Puzzanghera, Maurizio; Canino, Maria Concetta; Sozzi, Giovanna; Fedeli, Paolo. - 924:(2018), pp. 385-388. ((Intervento presentato al convegno International Conference on Silicon Carbide and Related Materials, ICSCRM 2017 tenutosi a usa nel 2017 [10.4028/www.scientific.net/MSF.924.385].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11381/2850488
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