Following the recent results about activation of iron diffused in InP we tried to increase the fraction of electrically active Fe atoms in InP crystals grown by the Liquid Encapsulation Czochralski method (LEC) by applying a type of `in-situ' annealing. Actually, by varying the pulling rate and the cooling rate, we observed that the Feactive/Fetotal ratio can be modified. Though the ratio is normally ranging between 0.60 and 0.70, it is found that the ratio is slightly higher corresponding to low pulling rates and considerably lower for pulling rates >14 mm/h. The purpose of this paper is that of showing how these growth parameters affect the Feactive/Fetotal ratio.
Iron segregation in LEC InP crystals / Fornari, R.; Moriglioni, M.; Thirumavalavan, M.; Zappettini, A.; Zuccalli, G.. - (1995), pp. 41-44. (Intervento presentato al convegno 7th International Conference on Indium Phosphide and Related Materials tenutosi a Sapporo, Jpn, nel 1995).
Iron segregation in LEC InP crystals
Fornari R.
Writing – Original Draft Preparation
;
1995-01-01
Abstract
Following the recent results about activation of iron diffused in InP we tried to increase the fraction of electrically active Fe atoms in InP crystals grown by the Liquid Encapsulation Czochralski method (LEC) by applying a type of `in-situ' annealing. Actually, by varying the pulling rate and the cooling rate, we observed that the Feactive/Fetotal ratio can be modified. Though the ratio is normally ranging between 0.60 and 0.70, it is found that the ratio is slightly higher corresponding to low pulling rates and considerably lower for pulling rates >14 mm/h. The purpose of this paper is that of showing how these growth parameters affect the Feactive/Fetotal ratio.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
