The capabilities of thermoluminescence (TL) performed in a scanning electron microscope using the electron beam for excitation at low temperatures are presented. This method allows spatially as well as spectrally resolved TL. In the case of low excitation densities and short excitation times, the primary electron scattering volume determines the spatial resolution of the subsequent measurement. The potential of this technique is demonstrated for the characterization of bulk and heteroepitaxial AlN. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.3000455]
Thermoluminescence in a scanning electron microscope / T., Schulz; M., Albrecht; K., Irmscher; C., Hartmann; J., Wollweber; Fornari, Roberto. - In: JOURNAL OF APPLIED PHYSICS. - ISSN 0021-8979. - 104:(2008), p. 083710. [10.1063/1.3000455]
Thermoluminescence in a scanning electron microscope
FORNARI, Roberto
2008-01-01
Abstract
The capabilities of thermoluminescence (TL) performed in a scanning electron microscope using the electron beam for excitation at low temperatures are presented. This method allows spatially as well as spectrally resolved TL. In the case of low excitation densities and short excitation times, the primary electron scattering volume determines the spatial resolution of the subsequent measurement. The potential of this technique is demonstrated for the characterization of bulk and heteroepitaxial AlN. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.3000455]I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
