Thick GaN layers were deposited by the reaction of gallium with ammonia. The Physical Vapour Transport (PVT) process with NH(3) addition is characterized by moderate NH(3) flow rates, pressures, and consumption of reactants, by reduced parasitic growth and no NH(4)Cl formation. Carbon addition to the ammonia results in growth of thicker layers at increased transport rate and in single crystals even at Ga super saturations, which would normally be too high for single crystalline growth. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

The role of carbon in transport processes during PVT growth of bulk GaN / H. J., Rost; D., Siche; D., Gogova; M., Albrecht; K., Jacobs; Fornari, Roberto. - In: PHYSICA STATUS SOLIDI. C, CURRENT TOPICS IN SOLID STATE PHYSICS. - ISSN 1862-6351. - 6:(2009), pp. 1484-1487. [10.1002/pssc.200881523]

The role of carbon in transport processes during PVT growth of bulk GaN

FORNARI, Roberto
2009-01-01

Abstract

Thick GaN layers were deposited by the reaction of gallium with ammonia. The Physical Vapour Transport (PVT) process with NH(3) addition is characterized by moderate NH(3) flow rates, pressures, and consumption of reactants, by reduced parasitic growth and no NH(4)Cl formation. Carbon addition to the ammonia results in growth of thicker layers at increased transport rate and in single crystals even at Ga super saturations, which would normally be too high for single crystalline growth. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
2009
The role of carbon in transport processes during PVT growth of bulk GaN / H. J., Rost; D., Siche; D., Gogova; M., Albrecht; K., Jacobs; Fornari, Roberto. - In: PHYSICA STATUS SOLIDI. C, CURRENT TOPICS IN SOLID STATE PHYSICS. - ISSN 1862-6351. - 6:(2009), pp. 1484-1487. [10.1002/pssc.200881523]
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11381/2683984
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