FTIR spectroscopy measurements were performed to investigate zirconia-based Ormosil thin films. Samples synthesized with a sol–gel technique were prepared starting from 3-glycidoxypropil-trimethoxysilane (GLYMO) and zirconium(IV)-propoxide (Zr–OPr). Acetic or nitric acid were used as a catalyst. The effects induced by the Zr content and the catalyst type on the mid-infrared spectra of the sol–gel hybrid films were studied and a detailed assignment of the vibrational absorption bands is presented. The thermal evolution of the hybrid systems was also followed by monitoring the release of the organic groups, the thickness, and refractive index changes by means of FTIR, diffuse reflectance spectroscopy, and ellipsometry.
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