Lower and Upper Bound for the Pull-in Parameters of a Micro- or Nanocantilever Beam Immersed in Liquid Electrolytes

An analytical method is proposed to accurately estimate the pull-in parameters of a micro- or nanocantilever beam immersed in liquid electrolytes with a flexible support at one end. The system is actuated by electrochemical force, namely the sum of electric and osmotic forces, and is subject to Casimir or van der Waals forces according to the spacing between the two electrodes. The deflection of the beam is described by a fourth-order nonlinear boundary value problem that can be formulated by an equivalent nonlinear integral equation. At first, a priori upper and lower analytical estimates on the beam deflection are derived and then very accurate lower and upper bounds for the pull-in voltage and tip deflection are obtained. The analytical predictions are in excellent agreement with the numerical results provided by the shooting method. Finally, a simple closed-form relation is proposed for the pull-in voltage under the effect of bulk ion concentration.