Nano and micro electro-mechanical systems (NEMS and MEMS) have been attracting a large amount of attention recently as they have extensive current/potential applications. However, due to their scale, molecular interaction and size effects are considerably high which needs to be considered in the theoretical modelling of their electro-mechanical behaviour. Both nano- and micro-scale electrically actuated structures are discussed when subjected to constant and time-varying voltages, and different theories and models, introduced in the past few years for modelling such small structures, are discussed. It is highlighted that considering the intermolecular forces and size-dependence effects can change both the static and dynamic behaviours of such systems significantly. This review presents the current stage of the research on electrically actuated NEMS/MEMS by analysing the latest models and studies in this field in the framework of electro-mechanical coupling and small-size effects.

A review on the statics and dynamics of electrically actuated nano and micro structures / Khaniki, H. B.; Ghayesh, M. H.; Amabili, M.. - In: INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS. - ISSN 0020-7462. - 129(2021), p. 103658. [10.1016/j.ijnonlinmec.2020.103658]

A review on the statics and dynamics of electrically actuated nano and micro structures

Amabili M.
2021

Abstract

Nano and micro electro-mechanical systems (NEMS and MEMS) have been attracting a large amount of attention recently as they have extensive current/potential applications. However, due to their scale, molecular interaction and size effects are considerably high which needs to be considered in the theoretical modelling of their electro-mechanical behaviour. Both nano- and micro-scale electrically actuated structures are discussed when subjected to constant and time-varying voltages, and different theories and models, introduced in the past few years for modelling such small structures, are discussed. It is highlighted that considering the intermolecular forces and size-dependence effects can change both the static and dynamic behaviours of such systems significantly. This review presents the current stage of the research on electrically actuated NEMS/MEMS by analysing the latest models and studies in this field in the framework of electro-mechanical coupling and small-size effects.
A review on the statics and dynamics of electrically actuated nano and micro structures / Khaniki, H. B.; Ghayesh, M. H.; Amabili, M.. - In: INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS. - ISSN 0020-7462. - 129(2021), p. 103658. [10.1016/j.ijnonlinmec.2020.103658]
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11381/2905689
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 13
  • ???jsp.display-item.citation.isi??? ND
social impact