Optical and electrical methods to measure the dynamic behavior of a MEMS gyroscope sensor

A full characterization of the mechanical parameters for vibrating MEMS sensors is required before integrating the mechanical and the electronic part. This is to verify that the main design specifications are fulfilled before sensors are available on the market. The main goal is to accurately establish the well-working devices in the shortest time. In this paper the electrical method based on the measurement of the GND current is used to satisfy this purpose. To check the validity of the achieved results through this method a comparison is done with those obtained through the widely used optical method based on vibration measurements through by means of a Laser Doppler Vibrometer (LDV). Copyright © 2005 by ASME.