Test pattern for dielectric properties of thin films at microwave frequencies

The evaluation of the dielectric properties of ferroelectric thin films, at high frequencies, is relevant because they are goo candidates for phase and frequency agile microwave components which are used in circuits such as phase shifters, filters, and local oscillators. Recently, some measuring procedures and main expressions for general analytical formula used in the determination of the dielectric properties of thin films at microwave have been presented. This work describes the methods that involve coplanar waveguide probes (CPW). A finite element analysis has been made on Metal-Insulator-Metal test structure to calculate some parasitic elements that cannot be estimated from measured data. A comparison between different measuments methods is presented.